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Fluid Transport through Nanochannels using Nanoelectromechanical Actuators

Department of Mechanical, Aerospace and Nuclear Engineering, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA

R. C. Picu

Department of Mechanical, Aerospace and Nuclear Engineering, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA, picuc{at}rpi.edu

J. Tichy

Department of Mechanical, Aerospace and Nuclear Engineering, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA

T. -M. Lu

Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA

G. -C. Wang

Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA

The article presents the basic principle of a nanodevice used to transport fluids through nanochannels. The nanochannel is defined by two parallel plates, one (or both of them) being covered by active thin films. The films deform under the action of an electric current passing in the film through the thickness direction. This leads to a local increase in film thickness, which forms a protrusion that narrows the channel. The propagation of such protrusions along the channel leads to the pumping effect. This motion is produced and controlled electronically. Here we focus on the mechanical actuation device as well as the ensuing coupled fluid and solid mechanics problem. We describe in detail the nature and function of the active films. Then, we provide an answer to the question: given a desired fluid flux, what is the magnitude and spatial distribution of the controlling current one has to supply to the actuators?

Key Words: nanostructures • NEMS • active materials • nanopumps

Journal of Intelligent Material Systems and Structures, Vol. 17, No. 3, 231-238 (2006)
DOI: 10.1177/1045389X06056861


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